Mono-dimensionally-modulated (MDM) multi-layered coatings based on amorphous alumina are deposited by reactive DC pulsed magnetron sputtering. The coatings are ideal for semiconductor equipment. The dense, strongly adherent and amorphous multi-layered coating system provides unique properties such as low residual stress, microstructural stability, low diffusion coefficients for both the oxygen and metallic ions, thermo-mechanical compatibility and excellent bonding to the substrate. The coating is suitable for various metallic substrates as well as many ceramics and polymers. Excellent micro-structural stability of the coating at elevated temperatures also makes it suitable for high temperature applications such as oxidation/corrosion protection of metallic alloys.
Key Benefits
- Amorphous from room temperature to 1100 C
- Low residual stress
- Stability at elevated temperatures
- Thermo-mechanical compatibility
- Strongly adherent interface between the individual layers
- Diffusion barrier for both oxygen and metallic ions
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Applications:
- Semiconductor equipments
- High temperature oxidation protection of superalloy
- TBCs for Hot-gas path components of gas turbines
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