PECVD Coatings:
Specialty PVD Coatings:
|
Coating Capabilities
Processes |
Key Benefits |
Radio Frequency Sputtering
DC Sputtering
DC or RF Magnetron Sputtering
Reactive Sputtering
Ion Plating
Ion Etching
Low Temperature Plasma-Enhanced CVD (PECVD)
Thermal Evaporation
|
Substrate sizes upto 24" in diameter, 12" high
Thickness control to ±2 millionths
Low temperature deposition with patterning available
|
Pure Materials |
Alloys |
Aluminum
Carbon/Graphite
Chromium
Cobalt
Copper
Gold
Halfnium
Iridium
Iron
Molybdenum
Nickel
Niobium
Palladium
Silicon
Silver
Tantalum
Tin
Titanium
Tungsten
Zirconium
|
Aluminum-Silicon
Boron Carbide
Chromium-Platinum
Copper-Tin
Cu-24Ni-3Ti
Inconel 825
Iron-Neodinium-Boron
Monel-400
Nickel-Titanium
Silicon Carbide
Silicon Oxynitride
304 Stainless Steel
316 Stainless Steel
Stellite
Ti-6Al-4V
Titanium Aluminide
Titanium diboride
Titanium-Niobium
Tungsten-10 Titanium
|
Nitrides |
Oxides |
Aluminum Nitride
Boron Nitride
Chromium Nitride
Halfnium Nitride
Niobium Nitride
Silicon Nitride
Tantalum Nitride
Titanium Nitride
Zirconium Nitride
|
Aluminum Oxide
Chromium Oxide
Indium Tin Oxide
Silicon dioxide
Tantalum Oxide
Titanium Oxide
Zirconium Oxide
|
|
