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Electrostatic Clamps or "E-chucks" as they are more commonly
known, have become essential tools in the silicon wafer processing industry.
Electrostatic Clamps reduce micro particle contamination and increase
usable wafer area for increased chip yield. Gas-cooled Electrostatic Clamps
also permit cooling of the wafer during processing. Surmet is a pioneer
in the fabrication and commercialization of ceramic Electrostatic Clamps
and has been supplying to this industry for more than 10 years. Surmet's coatings technologies
have played an important role in creating Electrostatic Clamps that
exhibit high clamping force and low backside particle count. All of
Surmet's Electrostatic Clamps are precision-manufactured with excellent
flatness and low surface roughness.
 
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