.:: SEMICONDUCTOR DIVISION::.

Semiconductor Applications

• Microparticle reduction
  
• Electrostatic Clamps

Coatings

• UltraC Diamond
  
• UHP Silicon
  
• Silicon Carbide
  
• Silicon Nitride
  

Advanced Ceramics

• ALON
  

Advanced Materials and Coatings for Semiconductor Equipment Manufacturers

Surmet Corporation is uniquely positioned to provide enabling advanced material solutions to semiconductor equipment manufacturers in their efforts to meet the ever-changing challenges of the electronics industry. To take Moore's Law to its logical next step, chipmakers are looking for the next generation process equipment that will allow them to fabricate ICs with smaller design rules, greater IC density and higher yields. In this manner, next generation low power consuming ICs with greater computing power can be made in large volumes at a lower cost.

Surmet produces innovative materials solutions to provide microparticle-free processing environments. The ability to apply microparticle-free and corrosion resistant high performance coatings on various substrate surfaces makes Surmet a leading problem solver in this demanding environment. Precision hardware devices such as electrostatic clamps, fabricated by Surmet, are helping customers achieve their target clamping force and minimal backside particle counts.

Semiconductor equipment manufacturers are in need of reliable, high purity advanced materials that allow new advanced processes to build ever finer lines on silicon wafer surfaces. The move by the industry to the large area 300mm. silicon wafers as the base for ICs, is heralding a new era and tremendous opportunities for Surmet's innovative material solutions.