Products & Applications
PA-CVD Technologies
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PA-CVD based Coating capabilities:
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UHP Amorphous Silicon
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Wear-resistant hard protective coatings – DLC, Si-based ceramics (SiC, SiCN, SiN and SiON)
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Anti-Reflection Coatings – Si based (SiOx, SiN, SiON)
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Hard, scratch-resistant Transparent Coatings – Si/Al based ceramics
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RIE – Removal of various coatings including DLC, SiN, TaO, SiOx, etc.
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SiC and SiCN
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Hard and durable
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Measured nano-hardness of over 25 GPa
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Tailorable electrical resistance (range from 106 to 1011 Ohm).
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Strongly Adherent to most substrates with tailored proprietary interlayers
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Very Low Deposition Temperatures, <150°C
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Thickness up to tens of microns possible
Optically Transparent Hard Coatings
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SiOx, SiN, SiON and other Si based coatings
- Compositions can be tailored to customer requirements -
Ultra-high purity
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Can be deposited on various substrate types
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Thickness up to several microns
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Very low deposition temperatures, <150°C
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Anti-reflection performance to transparent ceramic optics
Reactive Ion Etching (RIE)
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Tailored processes to remove various coatings
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Capable of removing DLC, SiC, Multilayered coatings, SixNy, etc, without significantly altering substrate roughness
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Thickness up to several microns can be removed
Our Si-cladding enables Figure and Finish in SiC Space Telescope Mirrors
Low Temperature Amorphous Silicon Cladding
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Featureless Amorphous microstructure
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Diamond-turnable, MRF'able, and Polishable, achieved TWFE performance as low as 0.015 to RMS
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Very Low Deposition Temperature, <100°C
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Not "line of sight" process, can coat complex shapes
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Strongly Adherent to many substrates
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Thickness from sub-micron to 55 microns achieved
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Applied on various substrate materials, including polymers
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Ultra-high Purity, impurities <10 ppm
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Current size capability up to ~32in. diam., can scale up if required
Coated interior of 36-in. production chamber for Semiconductor Fab - provides dust and contamination-free surface
Surmet's PACVD and PVD Coatings Technologies
Products & Applications
Capabilities – PVD
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Various metals, metal oxides, metal oxynitrides, metal nitrides.
- Compositions can be tailored to customer requirements -
Can be deposited on various substrate types
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Thicknesses of up to several microns